Markets - Semiconductor Processing

Morgan Technical Ceramics is at the forefront in the development of materials and components for the demanding environments of semiconductor processing. Its products are installed in fabrication plants all over the world, helping semiconductor manufacturers optimize their processes, maximize yield, and reduce their total cost of ownership.

Our ceramic components and sub-assemblies are used in wafer handling and processing chambers. The dimensional stability, high purity, corrosion resistance and excellent surface integrity of our advanced ceramic materials ensure reliable performance in the harsh environment of the fabrication chamber. Our Silicon Carbide materials help to produce a very high percentage of the silicon wafers made throughout the world that ultimately end up in everyday electronic products. 

With our world-class design expertise and specialist manufacturing capabilities, we work in partnership with semiconductor original equipment manufacturers (OEM’s) to develop competitive solutions to meet the needs of their customers. We produce ceramic components within tight specifications, in quantities from one-offs to very high quality medium-to-high volume production. 

Typical materials used:

• Alumina
• Aluminium Nitride
• CD (Charge Dissipative) Alumina
• Ceramic/Metal Assemblies
• CVD Silicon Carbide
• Dielectrics
• DLC (Diamond-Like Carbon) Coating
• Glass Preforms (Seals)
• Macor (Machineable Glass Ceramic)
• Piezo Ceramics & Assemblies
• Pyrolytic Boron Nitride (PBN)
• Silicon Carbide (SiC)
• Soft Coatings
• Zirconia (TZP)

Typical Applications:

• E-chucks
• Heater Assemblies
• Lift Pins
• Wafer Clamps
• End Effectors
• Paddles
• Chamber Rings
• Heaters
• Sputtering Targets
• Pin Chucks
• Feed-throughs
• Ion Beam Systems
• Power Supplies
• CMP Pad Conditioners
• RTP Edge Rings
• Crystal Growth Crucibles
• Edge Chamber Components

Download Semiconductor Brochure